External Dimension Performance Pedigree
Dimension of wafer (mm) Ø38xØ15x5 Static capaitance (pf) 4000
Diameter x height (mm) Ø59x67 Resonance Frequency (kHz) 28±0.3
Dimension of bolt hole M10x1.0 Bandwidth (kHz) 1.70
- - Impedance « 25
- - Insulates impedance » 100M
- - Power (W) 60



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